A two-scale model for one-dimensional arrays of cantilevers and its verification

H. Hui (1) , Michel Lenczner (1) , E. Pillet (1) , S. Cogan (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

We present a simplified model of the mechanical behavior of large arrays of cantilevers in the dynamic operating regime. The supporting base is assumed to be elastic thus cross-talk effect between the cantilevers is taken into account. Beforehand, the model has been mathematically justified starting from a thin plate model, using the two-scale approximation theory issued from homogenization theory and taking into account the strong heterogeneities of the system. The resulting model is not standard, so in this paper dedicated to its verification, we focus on some of its features in particular those related to the structure of its eigenmodes by both a qualitative and a quantitative analysis.

Domaines: Electronique

H. Hui, Michel Lenczner, E. Pillet, S. Cogan. A two-scale model for one-dimensional arrays of cantilevers and its verification. Mechatronics, 2012, 22 (5), pp.538-543. ⟨10.1016/j.mechatronics.2011.09.010⟩. ⟨hal-00776554⟩