Development of test platforms on flexible supports by laser ablation: micro sensor and micro heating applications

Monica Acualta (1) , Marc Bendahan (1) , S. Bernardini (1) , Laurent Gallais (2) , Khalifa Aguir (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 ILM - ILM

Domaines: Optique [physics.optics]

Monica Acualta, Marc Bendahan, S. Bernardini, Laurent Gallais, Khalifa Aguir. Development of test platforms on flexible supports by laser ablation: micro sensor and micro heating applications. Matériaux et Applications aux Dispositifs et Capteurs, Nov 2012, sousse, Tunisie. ⟨hal-00748281⟩