Experimental characterization of capacitively coupled radio-frequency discharges in N2-CH4

Abstract : We have performed extensive measurements in capacitively coupled radio-frequency discharges, producing N2-CH4 plasmas for methane concentrations between 0% and 10%. These dusty plasmas are well characterized by monitoring the evolution, with the methane concentration, of the electron density, the self-bias voltage, the coupled power, and the spectral line intensity of a number of optical transitions. The plasma properties exhibit drastic changes that are found correlated with the dust production regime
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https://hal.archives-ouvertes.fr/hal-00742550
Contributor : Catherine Cardon <>
Submitted on : Tuesday, October 16, 2012 - 3:45:35 PM
Last modification on : Wednesday, May 15, 2019 - 4:11:31 AM

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  • HAL Id : hal-00742550, version 1

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A. Gouveia, Ahmed Mahjoub, Nathalie Carrasco, L. Marques, L. L. Alves, et al.. Experimental characterization of capacitively coupled radio-frequency discharges in N2-CH4. ESCAMPIG 2012 (Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases), Jul 2012, Viana do Castelo, Portugal. 2 p. ⟨hal-00742550⟩

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