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RF Capacitively coupled plasmas in N2-H2 mixtures

Abstract : This paper studies the modifications induced in low-pressure radio-frequency capacitively coupled nitrogen plasmas, by the addition of a few amount of hydrogen (up to 5%). The plasmas are studied using both experiments (electrical and optical emission spectroscopy measurements) and simulations (using a fluid+kinetic code). Results reveal that the electron density increases with the amount of injected H2, at constant coupled power.
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Submitted on : Monday, October 15, 2012 - 1:33:09 PM
Last modification on : Tuesday, November 16, 2021 - 4:02:00 AM
Long-term archiving on: : Wednesday, January 16, 2013 - 3:38:25 AM


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  • HAL Id : hal-00741822, version 1


Ahmed Mahjoub, A. Gouveia, Nathalie Carrasco, C. D. Pintassilgo, L. Marques, et al.. RF Capacitively coupled plasmas in N2-H2 mixtures. ESCAMPIG 2012 (Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases), Jul 2012, Viana do Castelo, Portugal. 2 p. ⟨hal-00741822⟩



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