On the infuence of CO on a dusty N₂-CH₄ CCP RF discharge

Benjamin Fleury (1) , Nathalie Carrasco (1) , Thomas Gautier (1) , Ahmed Mahjoub (1) , Guy Cernogora (1)

1 PLANETO - LATMOS

In this work, we report the study of the effect of CO addition to a N2:CH4 RF CCP plasma. Results show that CO impacts some plasma properties such as the self-bias voltage and the methane consumption kinetics. CO introdution modifies slightly the chemical composition of the gaseous products but significantly increases the inclusion of O in dust produced in the discharge.

Domaines: Planétologie et astrophysique de la terre [astro-ph.EP]; Planétologie et astrophysique de la terre [astro-ph.EP]; Physique des plasmas [physics.plasm-ph]

Benjamin Fleury, Nathalie Carrasco, Thomas Gautier, Ahmed Mahjoub, Guy Cernogora. On the infuence of CO on a dusty N₂-CH₄ CCP RF discharge. ESCAMPIG 2012 (Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases), Jul 2012, Viana do Castelo, Portugal. 2 p. ⟨hal-00741761⟩