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On the infuence of CO on a dusty N2-CH4 CCP RF discharge

Benjamin Fleury 1 Nathalie Carrasco 1 Thomas Gautier 1 Ahmed Mahjoub 1 Guy Cernogora 1
LATMOS - Laboratoire Atmosphères, Milieux, Observations Spatiales
Abstract : In this work, we report the study of the effect of CO addition to a N2:CH4 RF CCP plasma. Results show that CO impacts some plasma properties such as the self-bias voltage and the methane consumption kinetics. CO introdution modifies slightly the chemical composition of the gaseous products but significantly increases the inclusion of O in dust produced in the discharge.
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Submitted on : Monday, October 15, 2012 - 11:47:03 AM
Last modification on : Tuesday, November 16, 2021 - 4:04:37 AM
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  • HAL Id : hal-00741761, version 1


Benjamin Fleury, Nathalie Carrasco, Thomas Gautier, Ahmed Mahjoub, Guy Cernogora. On the infuence of CO on a dusty N2-CH4 CCP RF discharge. ESCAMPIG 2012 (Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases), Jul 2012, Viana do Castelo, Portugal. 2 p. ⟨hal-00741761⟩



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