On the infuence of CO on a dusty N2-CH4 CCP RF discharge

Benjamin Fleury 1 Nathalie Carrasco 1 Thomas Gautier 1 Ahmed Mahjoub 1 Guy Cernogora 1
1 IMPEC - LATMOS
LATMOS - Laboratoire Atmosphères, Milieux, Observations Spatiales
Abstract : In this work, we report the study of the effect of CO addition to a N2:CH4 RF CCP plasma. Results show that CO impacts some plasma properties such as the self-bias voltage and the methane consumption kinetics. CO introdution modifies slightly the chemical composition of the gaseous products but significantly increases the inclusion of O in dust produced in the discharge.
Complete list of metadatas

Cited literature [1 references]  Display  Hide  Download

https://hal.archives-ouvertes.fr/hal-00741761
Contributor : Catherine Cardon <>
Submitted on : Monday, October 15, 2012 - 11:47:03 AM
Last modification on : Wednesday, May 15, 2019 - 4:11:36 AM
Long-term archiving on : Wednesday, January 16, 2013 - 3:38:07 AM

File

escampig2012_fleury.pdf
Files produced by the author(s)

Identifiers

  • HAL Id : hal-00741761, version 1

Citation

Benjamin Fleury, Nathalie Carrasco, Thomas Gautier, Ahmed Mahjoub, Guy Cernogora. On the infuence of CO on a dusty N2-CH4 CCP RF discharge. ESCAMPIG 2012 (Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases), Jul 2012, Viana do Castelo, Portugal. 2 p. ⟨hal-00741761⟩

Share

Metrics

Record views

469

Files downloads

79