On the modelling of the direct bonding of two silicon surfaces

Natacha Cocheteau (1) , Frédéric Lebon (1) , Iulian Rosu (1) , Aurelien Maurel-Pantel (1) , Sonia Ait Zaid (2) , Isabelle Savin de Larclause (2)

1 M&S - Matériaux et Structures
2 CNES - Centre National d'Études Spatiales [Toulouse]

Direct bonding is a well-known process. However in order to use this process in spatial instrument fabrication the mechanical resistance needs to be quantified. In order to improve bonded strength, optimal parameters of the process are found by studying the influence of annealing time, temperature and roughness which are studied using three experimental methods: double shear, cleavage and wedge tests. Those parameters are chosen thanks to the appearance of time/temperature equivalence. Results brought out a predictive model of the bonding energy.

Mots clés: Double Shear Test; Bonding Energy; Direct Bonding; cleavage; wedge test; process parameters; silica glasses; Zerodur® glasses

Domaines: Mécanique des solides [physics.class-ph]; Mécanique des solides [physics.class-ph]

Natacha Cocheteau, Frédéric Lebon, Iulian Rosu, Aurelien Maurel-Pantel, Sonia Ait Zaid, et al.. On the modelling of the direct bonding of two silicon surfaces. Eleventh International Conference on Computational Structures Technology, Sep 2012, Dubrovnik, Croatia. ⟨10.4203/ccp.99.143⟩. ⟨hal-00740761⟩