On the direct bonding of two silicon surfaces: experiments and modeling

Natacha Cocheteau (1) , Frédéric Lebon (1) , Iulian Rosu (1) , Sonia Ait Zaid (2) , Isabelle Savin de Larclause (2)

1 M&S - Matériaux et Structures
2 CNES - Centre National d'Études Spatiales [Toulouse]

Silicon direct bonding is a well known process in optic. In this communication we will present principles of molecular adhesion, chemical and mechanical characterization of the interface and a numerical study to predict the mechanical resistance of assemblies.

Mots clés: Silicon direct bonding; Modeling; Finite Elements; Surface energy; Roughness

Domaines: Mécanique des solides [physics.class-ph]; Mécanique des solides [physics.class-ph]

Natacha Cocheteau, Frédéric Lebon, Iulian Rosu, Sonia Ait Zaid, Isabelle Savin de Larclause. On the direct bonding of two silicon surfaces: experiments and modeling. Mechanics of Nano, Micro and Macro Composite Structures, Jun 2012, Turin, Italy. ⟨hal-00740759⟩