Working Principle Description of the Wireless Passive EM Transduction Pressure Sensor

Mohamed Mehdi Jatlaoui (1) , Franck Chebila (2) , Patrick Pons (2) , Hervé Aubert (2)

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil

The development of a new passive wireless pressure sensor, based on the Electromagnetic transduction, is reported. The sensing element is a flexible high resistivity silicon membrane located above a coplanar resonator. The comprehensive coverage of the physical bases is beyond the scope of this paper. For the remote extraction of the applied pressure value, the passive pressure sensor is connected to a broadband horn antenna via a coaxial delay line. When interrogated by a Frequency Modulated Continuous Wave Radar, the level of the backscattered signal changes in response to applied pressure. The measured dynamic is about 0.8 dBm/Bar. This completely passive and wireless pressure telemetry micro-sensor has been designed, fabricated and characterized, thereby eliminating the need for contact, signal processing circuits, and power supplies to be contained within conventional sensors.

Mots clés: Physical Sciences

Domaines: Micro et nanotechnologies/Microélectronique

Mohamed Mehdi Jatlaoui, Franck Chebila, Patrick Pons, Hervé Aubert. Working Principle Description of the Wireless Passive EM Transduction Pressure Sensor. European Physical Journal: Applied Physics, 2011, 56 (1), 13702-p1/6. ⟨hal-00629017⟩