An inverted-gap analog tuning RF-MEMS capacitor with 250 mW power handling capability

Fabien Barrière (1) , Damien Passerieux (1) , David Mardivirin (1) , Arnaud Pothier (1) , Pierre Blondy (1)

1 XLIM-MINACOM - MINACOM

A novel analog tuning MEMS variable capacitor is presented. By using an inverted-gap configuration, the mechanical effects of large RF-signals can be cancelled. Fabricated devices could handle 250 mW of power, with measured 2.2:1 capacitance variation, very high Q, and extremely low parasitic series inductance up to 10 GHz.

Fabien Barrière, Damien Passerieux, David Mardivirin, Arnaud Pothier, Pierre Blondy. An inverted-gap analog tuning RF-MEMS capacitor with 250 mW power handling capability. IEEE MEMS 2012 Conference, Jan 2012, Paris, France. pp.676 - 679. ⟨hal-00734112⟩