Robust Real-time Self-Mixing Interferometric Laser Vibration Sensor with Embedded MEMS Accelerometer

Usman Zabit (1) , Olivier Bernal (1) , Thierry Bosch (1)

1 LAAS-OSE - Équipe Optoélectronique pour les Systèmes Embarqués

In this paper, we present a real-time implementation of a Self-Mixing (SM) interferometric laser diode (LD) based vibration sensor coupled with an embedded MEMS (microelectromechanical system) accelerometer. Such a sensor allows measuring correct target movements even when the LD based SM sensor is subject to extraneous movements. This results in a vibration sensing system that can be used for embedded applications as there is no more need of keeping the sensor stationary. Such an approach opens the way for the use of such laser sensors in conditions where the use of anti-vibration support is not available or possible. The proposed data fusion between a MEMS accelerometer and a LD based SM sensor results in a robust, compact and low-cost sensing system.

Mots clés: embedded sensing; vibration measurement; displacement measurement; self-mixing interferometry; accelerometer; laser diode.; laser diode

Domaines: Optique / photonique; Electronique

Usman Zabit, Olivier Bernal, Thierry Bosch. Robust Real-time Self-Mixing Interferometric Laser Vibration Sensor with Embedded MEMS Accelerometer. 10TH INTERNATIONAL CONFERENCE ON VIBRATION MEASUREMENTS BY LASER AND NONCONTACT TECHNIQUES - AIVELA 2012, Jun 2012, Ancona, Italy. pp.148-155, ⟨10.1063/1.4730553⟩. ⟨hal-00733534⟩