Self-sensing measurement in piezoelectric cantilevered actuators for micromanipulation and microassembly contexts.

Ioan Alexandru Ivan (1) , Micky Rakotondrabe (1) , Philippe Lutz (1) , Nicolas Chaillet (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

This chapter aims to develop a self-sensing technique to measure the displacement and the force in piezoelectric microactuators dedicated to micromanipulation and microassembly contexts. In order to answer the requirements in these contexts, the developed self-sensing should perform a long duration measurement of constant signals (displacement and force) as well as a high precision. Furthermore, we propose to consider the dynamics in the displacement self-sensing measurement such that a positioning feedback is possible and therefore a high micro/nanopositioning accuracy is obtained. The experimental results validate the proposed technique and demonstrate its conveniency for micromanipulation and microassembly contexts.

Mots clés: Self-sensing; force and displacement signal; cantilevered piezoelectric actuators; micro and nano-scale.; micro and nano-scale

Domaines: Micro et nanotechnologies/Microélectronique

Ioan Alexandru Ivan, Micky Rakotondrabe, Philippe Lutz, Nicolas Chaillet. Self-sensing measurement in piezoelectric cantilevered actuators for micromanipulation and microassembly contexts.. Signal Measurement and Estimation Techniques for Micro and Nanotechnology., SPRINGER, pp.29-69, 2011, 978-1-4419-9945-0. ⟨10.1007/978-1-4419-9946-7⟩. ⟨hal-00719990⟩