Self-sensing measurement in piezoelectric cantilevered actuators for micromanipulation and microassembly contexts.

Ioan Ivan 1 Micky Rakotondrabe 1 Philippe Lutz 1 Nicolas Chaillet 1
1 AS2M/Sammi
FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
Abstract : This chapter aims to develop a self-sensing technique to measure the displacement and the force in piezoelectric microactuators dedicated to micromanipulation and microassembly contexts. In order to answer the requirements in these contexts, the developed self-sensing should perform a long duration measurement of constant signals (displacement and force) as well as a high precision. Furthermore, we propose to consider the dynamics in the displacement self-sensing measurement such that a positioning feedback is possible and therefore a high micro/nanopositioning accuracy is obtained. The experimental results validate the proposed technique and demonstrate its conveniency for micromanipulation and microassembly contexts.
Type de document :
Chapitre d'ouvrage
Signal Measurement and Estimation Techniques for Micro and Nanotechnology., SPRINGER, pp.29-69, 2011, 978-1-4419-9945-0. 〈10.1007/978-1-4419-9946-7〉
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https://hal.archives-ouvertes.fr/hal-00719990
Contributeur : Martine Azema <>
Soumis le : lundi 23 juillet 2012 - 11:56:26
Dernière modification le : vendredi 6 juillet 2018 - 15:06:10

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Ioan Ivan, Micky Rakotondrabe, Philippe Lutz, Nicolas Chaillet. Self-sensing measurement in piezoelectric cantilevered actuators for micromanipulation and microassembly contexts.. Signal Measurement and Estimation Techniques for Micro and Nanotechnology., SPRINGER, pp.29-69, 2011, 978-1-4419-9945-0. 〈10.1007/978-1-4419-9946-7〉. 〈hal-00719990〉

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