Micro-discharge plasma using silicon platform

Mukesh Kulsreshath (1) , Thierry Dufour (1) , Philippe Lefaucheux (1) , Olivier Aubry (1) , Sébastien Dozias (1) , Pierre Ranson (1) , Jeong Bong Lee (2) , Matthew Goeckner (2) , Lawrence J. Overzet (3) , Remi Dussart (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 PSAL - Plasma Science and Application Laboratory
3 PAL - Plasma Application Laboratory

Domaines: Physique des plasmas [physics.plasm-ph]

Mukesh Kulsreshath, Thierry Dufour, Philippe Lefaucheux, Olivier Aubry, Sébastien Dozias, et al.. Micro-discharge plasma using silicon platform. AVS 57th International Symposium & Exhibition, Oct 2010, Albuquerque, United States. ⟨hal-00707922⟩