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Communication Dans Un Congrès Année : 2012

SPM (spatial positioning model) to improve DFM methods effectiveness

Stephane Hubac
  • Fonction : Auteur
  • PersonId : 923456
Ali Siadat
  • Fonction : Auteur
  • PersonId : 875629

Résumé

Scribe line and infield test structures are used to model the design and manufacturing interface complexities resulting from technology scaling, manufacturing and fundamental limitations (Duane et. al, 1997 and Duane and James, 1996). The biggest challenge in accurately capturing these model to hardware gaps is our inability to accurately map, align and position the inspection data (PT, Inline, EWS, Defectivity) collected at die and field levels. The test structures are assumed to be the true representative of the products and are physically located at different positions, hence mapping and alignment do not capture the spatial variations which could answer even the random drifts. In this article we focus the challenge faced by the engineers in implementing DFM with the spatial variation based on test structures positions and the shortest distance between test structures measuring inspection parameters. We propose the SPM model that computes the test structure positions across the wafer and our intelligent algorithm find the target test structure in closest vicinity for spatial correlations. SPM model shall directly impact the productivity of engineers and empower engineers for an effective multi-source correlation.
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Dates et versions

hal-00703472 , version 1 (02-06-2012)

Identifiants

  • HAL Id : hal-00703472 , version 1

Citer

Muhammad Kashif Shahzad, Stephane Hubac, Ali Siadat, Michel Tollenaere. SPM (spatial positioning model) to improve DFM methods effectiveness. 12th European Advanced Process Control and Manufacturing Conference, Apr 2012, Grenoble, France. ⟨hal-00703472⟩
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