Plasma Enhanced Atomic Layer Deposition of ZrO2: A Thermodynamic Approach.

E. Blanquet (1) , D. Monnier (1) , I. Nuta (1) , F. Volpi (1) , B. Doisneau (1) , S. Coindeau (1) , J. Roy , B. Detlefs (2) , Y. Mi , J. Zegenhagen , C. Martinet , C. Wyon , M. Gros-Jean

1 SIMaP - Science et Ingénierie des Matériaux et Procédés
2 ESRF - European Synchrotron Radiation Facility

Domaines: Matériaux

E. Blanquet, D. Monnier, I. Nuta, F. Volpi, B. Doisneau, et al.. Plasma Enhanced Atomic Layer Deposition of ZrO2: A Thermodynamic Approach.. 219th ECS Meeting, May 2011, Montréal, Canada. ⟨hal-00692284⟩