Controlled Sampling of Nanoparticles in Reactive Plasmas

Carsten Godde (1) , Johannes Berndt (2) , Eva Kovacevic (2) , Ilija Stefanovic (3, 4) , Jörg Winter (3) , Laifa Boufendi (2)

1 RUB - Ruhr University Bochum = Ruhr-Universität Bochum
2 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
3 Institut für Experimentalphysik II
4 Institute of Physics

Reactive RF plasmas are an excellent source for the production of nanoparticles. The field of application of nanoparticles is nowadays rapidly growing, as well as the request for investigations on the nanoparticle material itself. Thus, we deal with the emerging need for targeted sampling of nanoparticles from the plasma. We developed a sampling system based on the effect of thermophoresis on the transport of nanoparticles within the plasma bulk.

Mots clés: plasma; nanoparticles; controlled sampling; temperature

Domaines: Physique des plasmas [physics.plasm-ph]

Carsten Godde, Johannes Berndt, Eva Kovacevic, Ilija Stefanovic, Jörg Winter, et al.. Controlled Sampling of Nanoparticles in Reactive Plasmas. IEEE Transactions on Plasma Science, 2011, 39 (11), pp.2766 - 2767. ⟨10.1109/TPS.2011.2157980⟩. ⟨hal-00690915⟩