Kalman filtering applied to weak force measurement and control at the microscale.

Mokrane Boudaoud (1) , Yassine Haddab (1) , Yann Le Gorrec (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Domaines: Micro et nanotechnologies/Microélectronique

Mokrane Boudaoud, Yassine Haddab, Yann Le Gorrec. Kalman filtering applied to weak force measurement and control at the microscale.. Signal Measurement and Estimation Techniques for Micro and Nanotechnology., SPRINGER, pp.71-92, 2011, 978-1-4419-9945-0. ⟨10.1007/978-1-4419-9946-7_7⟩. ⟨hal-00690753⟩