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Communication Dans Un Congrès Année : 2011

A Zero-Level Packaged RF-MEMS Switch with Large Contact Force

Fabien Barrière
  • Fonction : Auteur
  • PersonId : 919451
Arnaud Pothier
Aurelian Crunteanu
Matthieu Chatras
Pierre Blondy
  • Fonction : Auteur
  • PersonId : 915831

Résumé

This paper presents a novel compact RF-MEMS switch with large contact force. The switch can generate forces above 1.3mN, with 45V applied, while keeping a reasonable footprint. The actuator is based on a single metal 280μm diameter disc, that concentrates electrostatic force on a 8×8μm contact area. Zero level packaging is included in the fabrication, by intergating a metal electroplated shell fabricated above the mechanical part of the switch. The measured contact resistance of AuNi/Au contacts is 0.3Ω with 45V applied, and the off state capacitance of the packaged switch is 48fF.
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Dates et versions

hal-00684721 , version 1 (03-04-2012)

Identifiants

  • HAL Id : hal-00684721 , version 1

Citer

Fabien Barrière, Arnaud Pothier, Aurelian Crunteanu, Matthieu Chatras, Pierre Blondy. A Zero-Level Packaged RF-MEMS Switch with Large Contact Force. EuMW 2011, Manchester European Microwave Week 2011, Manchester Central, Oct 2011, Manchester, United Kingdom. pp.668-671. ⟨hal-00684721⟩

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