Modeling, Filtering and Optimization for AFM Arrays

Abstract : In this paper, we present new tools and results developed for Arrays of Microsystems and especially for Atomic Force Microscope (AFM) array design. For modeling, we developed a two-scale model of cantilever arrays in elastodynamics. A robust optimization toolbox is interfaced to aid for design before the microfabrication process. A model based algorithm of static state estimation using measurement of mechanical displacements by interferometry is stated. Quantization of interferometry data processing is analyzed for FPGA implementation. A robust H∞ filtering problem of the coupled cantilevers is solved for time invariant system with random noise effects. Our solution allows semi-decentralized computing based on functional calculus that can be implemented by networks of distributed electronic circuits as shown in a previous paper.
Document type :
Conference papers
Complete list of metadatas
Contributor : Sarah Djaouti <>
Submitted on : Thursday, March 8, 2012 - 9:42:38 AM
Last modification on : Monday, February 11, 2019 - 4:42:01 PM

Links full text



H. Hui, Y. Yakoubi, M. Lenczner, S. Cogan, A. Meister, et al.. Modeling, Filtering and Optimization for AFM Arrays. Conference 2011 12th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Apr 2011, Linz, Austria. pp.1/6-6/6, ⟨10.1109/ESIME.2011.5765783⟩. ⟨hal-00677345⟩



Record views