VALIDATION OF BENDING TEST BY NANOINDENTATION FOR MICRO-CONTACT ANALYSIS OF RF-MEMS SWITCHES

Adrien Broué (1, 2) , Thibaut Fourcade (1) , Jérémie Dhennin (3) , Frédéric Courtade (4) , Christel Dieppedale (5) , Patrick Pons (6) , Xavier Lafontan (7) , Robert Plana (2)

1 NOVAMEMS
2 LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 NovaMEMS
4 CNES - Centre National d'Études Spatiales [Toulouse]
5 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
6 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil
7 INTESENS - INTESENS

This paper demonstrates the validity of a new methodology using a commercial nanoindenter coupled with electrical measurement on test vehicles specially designed to investigate the micro-scale contact physics. Dedicated validation tests and modelling are performed to assess the introduced methodology by analysing the response of gold contact with 5 µm² square bumps under various levels of current flowing through contact asperities. Contact temperature rising is measured leading to shifts of the mechanical properties of contact material and modifications of the contact topology. In addition, the data provide a better understanding of micro-contact behaviour related to the impact of current at low- to medium-power levels.

Domaines: Micro et nanotechnologies/Microélectronique

Adrien Broué, Thibaut Fourcade, Jérémie Dhennin, Frédéric Courtade, Christel Dieppedale, et al.. VALIDATION OF BENDING TEST BY NANOINDENTATION FOR MICRO-CONTACT ANALYSIS OF RF-MEMS SWITCHES. Micromechanics Europe Conference 2009, Sep 2009, Toulouse, France. 4 p. ⟨hal-00670198⟩