Self-Assembled Monolayers deposition in Supercritical Carbon Dioxide

Laurent Rabbia (1, 2) , Vincent Perrut (2) , Patrick Pons (3) , Djemel Lellouchi (4)

1 LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 31 Degrees
3 LAAS-MINC - Équipe MIcro et Nanosystèmes pour les Communications sans fil
4 INTESENS - INTESENS

Self-Assembled Monolayers of organic molecules have been successfully deposited onto wafer surface in supercritical carbon dioxide. Deposition method and apparatus are described. The layers are characterized by AFM and water droplet contact angle. Interest of this technique compared to liquid and vapor phase is discussed and studied for surface conversion from hydrophilic to hydrophobic for different materials.

Domaines: Micro et nanotechnologies/Microélectronique

Laurent Rabbia, Vincent Perrut, Patrick Pons, Djemel Lellouchi. Self-Assembled Monolayers deposition in Supercritical Carbon Dioxide. MicroMechanics Europe Conference, Sep 2009, Toulouse, France. 4 p. ⟨hal-00670193⟩