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Article Dans Une Revue Surface and Coatings Technology Année : 2002

Nitrogen profiles in materials implanted via plasma-based ion implantation

Résumé

The lifetime of metallic components can be drastically increased by surface treatments ensuring a low friction coefficient, surface hardening and an anticorrosion coating. A promising method for such surface modifications is plasma-based ion implantation (PBII) of nitrogen. In order to improve and to obtain a better understanding of such a treatment, we have performed nitrogen implantation in different materials at various ion energy values using pure nitrogen and N2/H2 gas mixture plasmas. Fe and Ti samples were simultaneously treated in a large-volume PBII reactor in which the plasma is excited at the distributed electron cyclotron resonance. Si substrates were also implanted in order to characterize the nitrogen implantation efficiency by Fourier-transform infrared (FTIR) analysis. Profiles of the relative concentration of elements in the samples were deduced from X-ray photoelectron spectroscopy (XPS) analysis as a function of depth. The absolute concentration of implanted nitrogen was also obtained by nuclear reaction with 15N atoms implanted in metals via PBII from a 15N2/14N2 gas mixture. These results can be very useful for calibrating and improving PBII surface treatments of materials.

Dates et versions

hal-00669437 , version 1 (13-02-2012)

Identifiants

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A. Lacoste, Stéphane Béchu, Y. Arnal, J. Pelletier, Corentin Vallée, et al.. Nitrogen profiles in materials implanted via plasma-based ion implantation. Surface and Coatings Technology, 2002, 156 (1-3), pp.125-130. ⟨10.1016/S0257-8972(02)00076-2⟩. ⟨hal-00669437⟩
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