Capacitively coupled radio-frequency discharges in nitrogen at low pressure

Abstract : This paper studies capacitively coupled radio-frequency discharges (13.56 MHz frequency) in pure nitrogen, produced within the LATMOS and the GREMI cylindrical parallel-plate reactors, surrounded by a lateral grounded grid, at 2-30 W coupled powers and 0.2-1 mbar pressures. Simulations use an hybrid code [1] that couples a 2D (r,z) time-dependent fluid module for the charged particles and a 0D kinetic module for the nitrogen (atomic and molecular) neutral species. The coupling between these modules adopts the local mean energy approximation to define space-time dependent electron parameters for the fluid module and to work-out space-time average rates for the kinetic module. The model gives good predictions for the self-bias voltage and for the intensities of radiative transitions (average and spatially-resolved OES measurements) with the nitrogen SPS and FNS, and with the argon 811nm atomic line (present as an actinometer). Model results underestimate the experimental electron density (average resonant-cavity measurements) by a factor of 3-4. [4pt] [1] L. Marques et al, J. Appl. Phys. 102, 063305 (2007).
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Poster communications
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Submitted on : Sunday, February 12, 2012 - 11:04:04 PM
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L. L. Alves, L. Marques, C. D. Pintassilgo, G. Wattieaux, Et-Touhami Es-Sebbar, et al.. Capacitively coupled radio-frequency discharges in nitrogen at low pressure. 64th Annual Gaseous Electronics Conference (GEC), Nov 2011, Salt Lake City, United States. ⟨hal-00669322⟩

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