Simultaneous measurement of Young's modulus and Poisson's ratio at microscale with two-modes scanning microdeformation microscopy

J. Le Rouzic (1) , Patrick Delobelle (1) , Bernard Cretin (1) , Pascal Vairac (1) , Fabien Amiot (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

In this paper, we present a technique to simultaneously measure Young's modulus E and Poisson's ratio ν of an isotropic material at local scale in a single experiment. Using several flexural modes of vibration of the scanning microdeformation microscope, it is possible to decouple the contributions of E and ν from the first two resonant frequencies, thereby providing access to both the elastic parameters. The proposed approach is applied to SU8 thin films deposited on silicon substrates and provides values consistent with those from the literature.

Domaines: Mécanique [physics.med-ph]; Acoustique [physics.class-ph]; Matériaux; Micro et nanotechnologies/Microélectronique

J. Le Rouzic, Patrick Delobelle, Bernard Cretin, Pascal Vairac, Fabien Amiot. Simultaneous measurement of Young's modulus and Poisson's ratio at microscale with two-modes scanning microdeformation microscopy. Materials Letters, 2012, 68 (1), pp.370-373. ⟨10.1016/j.matlet.2011.11.012⟩. ⟨hal-00660331⟩