Surface mechanics and full-field measurements for micromechanical sensors

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https://hal.archives-ouvertes.fr/hal-00659728
Contributor : Christine Froidevaux <>
Submitted on : Friday, January 13, 2012 - 3:07:01 PM
Last modification on : Monday, February 25, 2019 - 4:34:17 PM

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  • HAL Id : hal-00659728, version 1

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Fabien Amiot, Y. Fedala, Cécile Flammier, N. Garraud, F. Kanoufi, et al.. Surface mechanics and full-field measurements for micromechanical sensors. 7th International Workshop on Nanomechanical Cantilever Sensors, May 2010, Banff, Canada. ⟨hal-00659728⟩

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