Modeling and identification of a microcantilever system in an unknown viscous fluid

Mohamad Elbsat (1) , Edwin Yaz (1) , Schneider Susan (1) , Isabelle Dufour (2) , Fabien Josse (1)

1 Department of Electrical and Computer Engineering
2 IMS - Laboratoire de l'intégration, du matériau au système

Domaines: Micro et nanotechnologies/Microélectronique

Mohamad Elbsat, Edwin Yaz, Schneider Susan, Isabelle Dufour, Fabien Josse. Modeling and identification of a microcantilever system in an unknown viscous fluid. IASTED International Conference Modelling, Simulation, and Identification (MSI 2011), 2011, Pittsburgh, United States. pp.268-274, ⟨10.2316/P.2011.755-066⟩. ⟨hal-00652240⟩