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Communication Dans Un Congrès Année : 2011

A new acoustic resonator concept based on acoustic waveguides using Silicon/Periodically Poled Transducer/Silicon structures for RF applications

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We propose a new acoustic resonator concept based on a periodically poled transducer (PPT) in a piezoelectric substrate (LiNbO(3) or LiTaO(3)), embedded between two guiding substrates in order to create an acoustic waveguide. A resonator operating at 131MHz have been successfully fabricated and used in order to stabilize an oscillator. However the fabricated resonator presents a significant thermal sensitivity. The following experiments have consisted in studying a Si/thinned PPT layer/Si in order to reduce the thermal sensitivity.
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hal-00651266 , version 1 (09-04-2021)

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F. Bassignot, G. Ulliac, J.-M. Lesage, J. Garcia, E. Courjon, et al.. A new acoustic resonator concept based on acoustic waveguides using Silicon/Periodically Poled Transducer/Silicon structures for RF applications. 5th Joint Conference of the 65th IEEE International Frequency Control Symposium/25th European Frequency and Time Forum, May 2011, San Francisco, United States. pp.363-368, ⟨10.1109/FCS.2011.5977823⟩. ⟨hal-00651266⟩
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