A new acoustic resonator concept based on acoustic waveguides using Silicon/Periodically Poled Transducer/Silicon structures for RF applications

Abstract : We propose a new acoustic resonator concept based on a periodically poled transducer (PPT) in a piezoelectric substrate (LiNbO(3) or LiTaO(3)), embedded between two guiding substrates in order to create an acoustic waveguide. A resonator operating at 131MHz have been successfully fabricated and used in order to stabilize an oscillator. However the fabricated resonator presents a significant thermal sensitivity. The following experiments have consisted in studying a Si/thinned PPT layer/Si in order to reduce the thermal sensitivity.
Type de document :
Communication dans un congrès
5th Joint Conference of the 65th IEEE International Frequency Control Symposium/25th European Frequency and Time Forum, May 2011, San Francisco, United States. pp.363-368, 2011
Liste complète des métadonnées

https://hal.archives-ouvertes.fr/hal-00651266
Contributeur : Sarah Djaouti <>
Soumis le : mardi 13 décembre 2011 - 11:23:58
Dernière modification le : vendredi 6 juillet 2018 - 15:06:07

Identifiants

  • HAL Id : hal-00651266, version 1

Citation

F. Bassignot, G. Ulliac, J.-M. Lesage, J. Garcia, E. Courjon, et al.. A new acoustic resonator concept based on acoustic waveguides using Silicon/Periodically Poled Transducer/Silicon structures for RF applications. 5th Joint Conference of the 65th IEEE International Frequency Control Symposium/25th European Frequency and Time Forum, May 2011, San Francisco, United States. pp.363-368, 2011. 〈hal-00651266〉

Partager

Métriques

Consultations de la notice

91