P. Jonnard, H. Maury, K. Le-guen, J. André, N. Mahne et al., Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers, Surface Science, vol.604, issue.11-12, p.1015, 2010.
DOI : 10.1016/j.susc.2010.03.012
URL : https://hal.archives-ouvertes.fr/hal-00648594

K. Le-guen, M. Hu, J. André, P. Jonnard, S. K. Zhou et al., Development and Interfacial Characterization of Co/Mg Periodic Multilayers for the EUV Range, The Journal of Physical Chemistry C, vol.114, issue.14, p.6484, 2010.
DOI : 10.1021/jp911119z
URL : https://hal.archives-ouvertes.fr/hal-00661047

P. Boher, L. Hennet, and P. , Houdy: Advanced X-Ray/EUV Radiation Sources and Applications, Proc. SPIE 1345, p.198, 1990.

M. Singh and J. J. Braat, Design of multilayer extreme-ultraviolet mirrors for enhanced reflectivity, Applied Optics, vol.39, issue.13, p.2189, 2000.
DOI : 10.1364/AO.39.002189

J. Gautier, F. Delmotte, M. Roulliay, F. Bridou, M. Ravet et al., Study of normal incidence of three-component multilayer mirrors in the range 20???40 nm, Applied Optics, vol.44, issue.3, p.384, 2005.
DOI : 10.1364/AO.44.000384
URL : https://hal.archives-ouvertes.fr/hal-00575801