One port contour-mode ZnO piezoelectric MEMS resonator

Tadeusz Gryba (1) , Julien Carlier (1, 2) , S.X. Wang , X.Z. Zhao , S. Guo , Jean-Etienne Lefebvre

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 MAMINA - IEMN - Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN

This paper reports on design, fabrication and experimental testing of one port ZnO contour-mode resonant MEMS. The devices are fabricated from silicon wafers using a 4-mask process. The use of contour modes, whose frequencies are set by lithographically defined dimensions, permits the fabrication of multiple filters at arbitrary frequencies on the same chip. The one port ZnO contour mode resonator is compared with the AlN structure.

Mots clés: Aluminium nitride; MEMS resonators; Piezoelectric resonators; Zinc-oxide

Domaines: Sciences de l'ingénieur [physics]

Tadeusz Gryba, Julien Carlier, S.X. Wang, X.Z. Zhao, S. Guo, et al.. One port contour-mode ZnO piezoelectric MEMS resonator. Microelectronic Engineering, 2011, 88, pp.3003-3010. ⟨10.1016/j.mee.2011.04.062⟩. ⟨hal-00639933⟩