Thermally actuated silicon tuning fork resonators for sensing applications in air

Luke Beardslee (1) , Jonathan Lehmann (1) , Christopher Carron (1) , Jin-Jyh Su (1) , Fabien Josse (2) , Isabelle Dufour (3) , Oliver Brand (1)

1 ECE GeorgiaTech - School of Electrical and Computer Engineering - Georgia Insitute of Technology
2 Department of Electrical and Computer Engineering
3 IMS - Laboratoire de l'intégration, du matériau au système

Domaines: Micro et nanotechnologies/Microélectronique

Luke Beardslee, Jonathan Lehmann, Christopher Carron, Jin-Jyh Su, Fabien Josse, et al.. Thermally actuated silicon tuning fork resonators for sensing applications in air. IEEE MEMS 2012 Conference, 2012, Paris, France. 4 p., ⟨10.1109/MEMSYS.2012.6170261⟩. ⟨hal-00636029⟩