Nonlinearity characterization of temperature sensing systems for integrated circuit testing by intermodulation products monitoring

Josep Altet (1) , Diego Mateo (1) , Xavier Perpinya (2) , Stéphane Grauby (3) , Stefan Dilhaire (3) , Xavier Jordà (2)

1 Electronic Engineering Department
2 CNM - Centre Nacional de Microelectrònica
3 LOMA - Laboratoire Ondes et Matière d'Aquitaine

This work presents an alternative characterization strategy to quantify the nonlinear behavior of temperature sensing systems. The proposed approach relies on measuring the temperature under thermal sinusoidal steady state and observing the intermodulation products that are generated within the sensing system itself due to its nonlinear temperature-output voltage characteristics. From such intermodulation products, second-order interception points can be calculated as a figure of merit of the measuring system nonlinear behavior. In this scenario, the present work first shows a theoretical analysis. Second, it reports the experimental results obtained with three thermal sensing techniques used in integrated circuits.

Josep Altet, Diego Mateo, Xavier Perpinya, Stéphane Grauby, Stefan Dilhaire, et al.. Nonlinearity characterization of temperature sensing systems for integrated circuit testing by intermodulation products monitoring. Review of Scientific Instruments, 2011, 82, pp.094902 (4). ⟨10.1063/1.3633957⟩. ⟨hal-00635099⟩