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Hysteresis Suppression in Nonlinear Mathieu M/NEMS Resonators

Abstract : In order to compensate the loss of performances when scaling resonant sensors down to NEMS, it proves extremely useful to study the behavior of resonators up to very high displacements and hence high nonlinearities. This work describes a comprehensive nonlinear multiphysics model based on the Euler-Bernoulli equation which includes both mechanical and electrostatic nonlinearities valid up to displacements comparable to the gap in the case of a capacitive doubly clamped beam. Moreover, the model takes into account the fringing field effects, significant for thin resonators. The model has been compared to electrical measurements of devices fabricated on 200mm SOI wafers and show a very good agreement. This model allows designers to cancel out nonlinearities by tuning some design parameters and thus gives the possibility to drive the resonator beyond its critical amplitude. Consequently, the sensors performances can be enhanced to the maximum bellow the pull-in amplitude, while keeping a linear behavior.
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Najib Kacem, Sebastien Hentz, Sébastien Baguet, Régis Dufour. Hysteresis Suppression in Nonlinear Mathieu M/NEMS Resonators. ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC/CIE2009), Aug 2009, San Diego, CA, United States. pp.787-792, ⟨10.1115/DETC2009-86717⟩. ⟨hal-00633122⟩

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