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Article Dans Une Revue IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control Année : 2010

AlN/ZnO/diamond waveguiding layer acoustic wave structure: theoretical and experimental results.

Omar Elmazria
Sergei Zhgoon
  • Fonction : Auteur
Frederic Sarry

Résumé

We present a theoretical calculation and experimental results for a waveguiding layer acoustic wave (WLAW). The experimental device is modeled by the finite element method (FEM) for the AlN/ZnO/diamond structure. It was found that the AlN thickness must be at least larger than 3λ/2 to obtain negligible surface displacement. In the same way, the ZnO thickness for a fixed value of AlN thickness at 2λ must be larger than λ/4 to confine the acoustic wave. The electromechanical coupling of the wave presents an optimum around λ/2 for the ZnO layer thickness. A first experimental AlN/ZnO/diamond device has been developed and shows the WLAW at 412 MHz.
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Dates et versions

hal-00628408 , version 1 (03-10-2011)

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Omar Elmazria, Sergei Zhgoon, Akram Soussou, Frederic Sarry, M. A. Djouadi, et al.. AlN/ZnO/diamond waveguiding layer acoustic wave structure: theoretical and experimental results.. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2010, 57 (8), pp.1818. ⟨10.1109/TUFFc.2010.1620⟩. ⟨hal-00628408⟩
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