Plasma Pulsing for Atomic Layer Etching Application

P. Bodart (1) , C. Petit-Etienne (1) , G. Cunge (1) , L. Vallier (1) , Maxime Darnon (1) , M. Haass (1) , E. Pargon (1) , S. Banna , T. Lill , O. Joubert (1)

1 LTM - Laboratoire des technologies de la microélectronique

P. Bodart, C. Petit-Etienne, G. Cunge, L. Vallier, Maxime Darnon, et al.. Plasma Pulsing for Atomic Layer Etching Application. 3rd Plasma Etch and Strip in Microelectronics Workshop, Mar 2010, Grenoble, France. ⟨hal-00625384⟩