FBAR Filters for Space Application Based on LiNbO3 Membrane

Abstract : Film bulk acoustic resonator (FBAR) usually use for filter application, can be used to address aerospace filter application which need large band. Then, it needs to use piezoelectric material with high electromechanical coupling coefficient. So we use LiNbO3 cut YXl/36 which have coupling coefficient for longitudinal mode of 37.5%.
Complete list of metadatas

Contributor : Sarah Djaouti <>
Submitted on : Friday, September 16, 2011 - 2:09:54 PM
Last modification on : Friday, July 6, 2018 - 3:06:06 PM


  • HAL Id : hal-00624320, version 1


T. Baron, Matthieu Chatras, S. Ballandras. FBAR Filters for Space Application Based on LiNbO3 Membrane. 2nd International Workshop on Piezoelectric MEMS 2011, Sep 2011, Lausanne, Switzerland. ⟨hal-00624320⟩



Record views