Comparison of the temperature dependence of the properties of ion beam and magnetron sputtered Fe films on (100) GaAs, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.17, issue.2, pp.571-576, 1999. ,
DOI : 10.1116/1.581620
The energy balance at substrate surfaces during plasma processing, Vacuum, vol.63, issue.3, pp.385-431, 2001. ,
DOI : 10.1016/S0042-207X(01)00350-5
Recent progress in thin film processing by magnetron sputtering with plasma diagnostics, Journal of Physics D: Applied Physics, vol.42, issue.4, p.43001, 2009. ,
DOI : 10.1088/0022-3727/42/4/043001
Recent advances in sputter deposition, Surface and Coatings Technology, vol.71, issue.2, pp.93-97, 1995. ,
DOI : 10.1016/0257-8972(95)80024-7
Polymorphous silicon thin films produced in dusty plasmas: application to solar cells, Plasma Physics and Controlled Fusion, vol.46, issue.12B, p.235, 2004. ,
DOI : 10.1088/0741-3335/46/12B/020
Low temperature plasma synthesis of silicon nanocrystals: a strategy for high deposition rate and efficient polymorphous and microcrystalline solar cells, Plasma Physics and Controlled Fusion, vol.50, issue.12, p.124037, 2008. ,
DOI : 10.1088/0741-3335/50/12/124037
Experimental evidence for nanoparticle deposition in continuous argon???silane plasmas: Effects of silicon nanoparticles on film properties, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.14, issue.2, pp.655-659, 1996. ,
DOI : 10.1116/1.580162
Influence of plasma modification of titanium carbide powder on its sintering properties, Journal of Materials Science Letters, vol.22, issue.23, pp.1694-1697, 1995. ,
DOI : 10.1007/BF00422678
Nonthermal plasma synthesis of semiconductor nanocrystals, Journal of Physics D: Applied Physics, vol.42, issue.11, p.113001, 2009. ,
DOI : 10.1088/0022-3727/42/11/113001
MoS2 nanoparticle formation in a low pressure environment, Journal of Applied Physics, vol.86, issue.6, pp.3442-3451, 1999. ,
DOI : 10.1063/1.371227
Selective nanoparticle heating: Another form of nonequilibrium in dusty plasmas, Physical Review E, vol.79, issue.2, p.26405, 2009. ,
DOI : 10.1103/PhysRevE.79.026405
plasmas, Nanotechnology, vol.21, issue.2, p.25605, 2010. ,
DOI : 10.1088/0957-4484/21/2/025605
Plasma-assisted self-organized growth of uniform carbon nanocone arrays, Carbon, vol.45, issue.10, p.2022, 2007. ,
DOI : 10.1016/j.carbon.2007.05.030
Mechanism of hydrogen-induced crystallization of amorphous silicon, Nature, vol.30, issue.6893, p.62, 2002. ,
DOI : 10.1016/S0009-2614(01)00777-1
Hydrogen in plasma-nanofabrication: Selective control of nanostructure heating and passivation, Applied Physics Letters, vol.96, issue.13, p.133105, 2010. ,
DOI : 10.1063/1.3374324
Particles as probes for complex plasmas in front of biased surfaces, New Journal of Physics, vol.11, issue.1, p.13041, 2009. ,
DOI : 10.1088/1367-2630/11/1/013041
Charging of particles in a plasma, Plasma Sources Science and Technology, vol.3, issue.3, p.400, 1994. ,
DOI : 10.1088/0963-0252/3/3/025
Particle charging in low???pressure plasmas, Journal of Applied Physics, vol.77, issue.9, p.4285, 1995. ,
DOI : 10.1063/1.359451
Coagulation in a low-temperature plasma, Journal of Physics D: Applied Physics, vol.29, issue.3, p.655, 1996. ,
DOI : 10.1088/0022-3727/29/3/026
The Coagulation Rate of Charged Aerosols in Ionized Gases, Journal of Colloid and Interface Science, vol.187, issue.2, p.474, 1997. ,
DOI : 10.1006/jcis.1996.4723
Trapping and behavior of particulates in a radio frequency magnetron plasma etching tool, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.11, issue.4, p.1132, 1993. ,
DOI : 10.1116/1.578453
Measurement of plasma-surface energy fluxes in an argon rf-discharge by means of calorimetric probes and fluorescent microparticles, Physics of Plasmas, vol.17, issue.11, p.113707, 2010. ,
DOI : 10.1063/1.3484876
Temperature of Particulates in Low-Pressure rf-Plasmas in Ar, Ar/H2 and Ar/N2 Mixtures, Contributions to Plasma Physics, vol.93, issue.9, p.954, 2010. ,
DOI : 10.1002/ctpp.201000022
Plasma synthesis of single-crystal silicon nanoparticles for novel electronic device applications, Plasma Physics and Controlled Fusion, vol.46, issue.12B, pp.97-109, 2004. ,
DOI : 10.1088/0741-3335/46/12B/009
Probe theory - the orbital motion approach, Physica Scripta, vol.45, issue.5, pp.497-503, 1992. ,
DOI : 10.1088/0031-8949/45/5/013
Thermal balance of carbon nanoparticles in sputtering discharges, Journal of Applied Physics, vol.105, issue.6, p.63301, 2009. ,
DOI : 10.1063/1.3081640
Charging, Coagulation, and Heating Model of Nanoparticles in a Low-Pressure Plasma Accounting for Ion–Neutral Collisions, IEEE Transactions on Plasma Science, vol.38, issue.4, pp.803-809, 2010. ,
DOI : 10.1109/TPS.2009.2035700
Surface temperature and thermal balance of probes immersed in high density plasma, Plasma Sources Science and Technology, vol.7, issue.4, pp.590-598, 1998. ,
DOI : 10.1088/0963-0252/7/4/016
Grain surface temperature in noble gas discharges: Refined analytical model, Physics of Plasmas, vol.13, issue.10, p.104506, 2006. ,
DOI : 10.1063/1.2359282
Particulate temperature in radio frequency glow discharges, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol.11, issue.4, pp.1126-1131, 1993. ,
DOI : 10.1116/1.578452
Measuring the temperature of microparticles in plasmas, Review of Scientific Instruments, vol.79, issue.9, p.93508, 2008. ,
DOI : 10.1063/1.2987688
Microcalorimetry of dust particles in a radio-frequency plasma, Journal of Applied Physics, vol.88, issue.4, pp.1747-1755, 2000. ,
DOI : 10.1063/1.1302993
A calorimetric probe for plasma diagnostics, Review of Scientific Instruments, vol.81, issue.2, p.23504, 2010. ,
DOI : 10.1063/1.3276707
Interaction of injected dust particles with metastable neon atoms in a radio frequency plasma, New Journal of Physics, vol.10, issue.5, p.53010, 2008. ,
DOI : 10.1088/1367-2630/10/5/053010
Exact Solution for the Generalized Bohm Criterion in a Two-Ion-Species Plasma, Physical Review Letters, vol.99, issue.15, p.155004, 2007. ,
DOI : 10.1103/PhysRevLett.99.155004
The Ionization Potential of Molecular Hydrogen, Physical Review, vol.40, issue.4, pp.496-501, 1932. ,
DOI : 10.1103/PhysRev.40.496
Bond Dissociation Energies in Simple Molecules, 1970. ,
DOI : 10.6028/NBS.NSRDS.31
Team: NIST Atomic Specta Database. NIST Atomic Spectra Database (version 3, 2008. ,
Experimental determination of the H3+ bond dissociation energy, Chemical Physics Letters, vol.152, issue.1, pp.71-74, 1988. ,
DOI : 10.1016/0009-2614(88)87330-5
Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: Effect of adding H2 to an Ar discharge, Journal of Applied Physics, vol.93, issue.9, pp.5025-5033, 2003. ,
DOI : 10.1063/1.1563820
On determination of the degree of dissociation of hydrogen in non-equilibrium plasmas by means of emission spectroscopy: II. Experimental verification, Plasma Sources Science and Technology, vol.15, issue.1, p.147, 2006. ,
DOI : 10.1088/0963-0252/15/1/021