On the size-dependent elasticity of silicon nanocantilevers: impact of defects

Hamed Sadeghian (1, 2) , Hans Goosen (1) , Andre Bossche (1) , Barend Thijsse (3) , Fred van Keulen (1)

1 Department of Precision and Microsystems Engineering
2 Department of Microelectronics
3 Department of Materials Science and Engineering

Recent measurements have indicated that the elastic behavior of silicon nanocantilevers and nanowires is size-dependent. Several theoretical models have been proposed to explain this phenomenon, mainly focused on surface stress effects. However, discrepancies are found between experiments and theories, indicating that there could be other influences besides surface effects. One of the important issues, which was experimentally confirmed and has not been considered, is accounting for the fact that experimentally tested nanocantilevers and nanowires are not defect free. In this paper molecular dynamics (MD) is utilized to study the effects of defects on the elasticity of silicon. The effective Young's modulus of [ 100 ] and [ 110 ] oriented silicon nanoplates is extracted in presence of defects, showing that such defects significantly influence the size-dependent behavior in. The MD results are compared with the results of continuum theory, showing that continuum theory holds, even for very small defects. Taking into account the surface effects, native oxide layers together with fabrication-induced defects, the experimental measurements can be explained. The studied example involved nanocantilevers, but can be extended to nanowires.

Mots clés: Physical Sciences

Hamed Sadeghian, Hans Goosen, Andre Bossche, Barend Thijsse, Fred van Keulen. On the size-dependent elasticity of silicon nanocantilevers: impact of defects. Journal of Physics D: Applied Physics, 2011, 44 (7), pp.72001. ⟨10.1088/0022-3727/44/7/072001⟩. ⟨hal-00594970⟩