Facing the defect characterization and localization challenges of bridge defects on submicronic technology (45nm and below)

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Communication dans un congrès
20th European Symposium Reliability on Electron Devices, Failure Physics and Analysis (ESREF) 2010, Oct 2010, Monteccassino, Italy. pp.1, 2010
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https://hal.archives-ouvertes.fr/hal-00585662
Contributeur : Chrystel Plumejeau <>
Soumis le : mercredi 13 avril 2011 - 16:42:52
Dernière modification le : jeudi 11 janvier 2018 - 06:21:09

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  • HAL Id : hal-00585662, version 1

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Guillaume Celi, Sylvain Dudit, Philippe Perdu, A. Reverdy, T. Parrassin, et al.. Facing the defect characterization and localization challenges of bridge defects on submicronic technology (45nm and below). 20th European Symposium Reliability on Electron Devices, Failure Physics and Analysis (ESREF) 2010, Oct 2010, Monteccassino, Italy. pp.1, 2010. 〈hal-00585662〉

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