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Facing the defect characterization and localization challenges of bridge defects on submicronic technology (45nm and below)

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https://hal.archives-ouvertes.fr/hal-00585662
Contributor : Chrystel Plumejeau <>
Submitted on : Wednesday, April 13, 2011 - 4:42:52 PM
Last modification on : Thursday, July 25, 2019 - 4:34:16 PM

Identifiers

  • HAL Id : hal-00585662, version 1

Citation

Guillaume Celi, Sylvain Dudit, Philippe Perdu, A. Reverdy, T. Parrassin, et al.. Facing the defect characterization and localization challenges of bridge defects on submicronic technology (45nm and below). 20th European Symposium Reliability on Electron Devices, Failure Physics and Analysis (ESREF) 2010, Oct 2010, Monteccassino, Italy. pp.1. ⟨hal-00585662⟩

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