Sacrificial layer method applied to multilayer microcomponents production

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https://hal.archives-ouvertes.fr/hal-00585445
Contributor : Isabelle Dufour <>
Submitted on : Tuesday, April 12, 2011 - 9:31:10 PM
Last modification on : Thursday, January 11, 2018 - 6:21:09 AM

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  • HAL Id : hal-00585445, version 1

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Claude Lucat, J. Chartier. Sacrificial layer method applied to multilayer microcomponents production. Tech-connect Meeting, 2009, Houston, United States. 2 p. ⟨hal-00585445⟩

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