BAW Pressure Sensor on LiNbO3 Membrane Lapping

Complete list of metadatas

https://hal.archives-ouvertes.fr/hal-00578951
Contributor : Sarah Djaouti <>
Submitted on : Tuesday, March 22, 2011 - 5:10:30 PM
Last modification on : Friday, July 6, 2018 - 3:06:08 PM

Identifiers

  • HAL Id : hal-00578951, version 1

Citation

T. Baron, J. Masson, J.-P. Romand, S. Alzuaga, Lise Catherinot, et al.. BAW Pressure Sensor on LiNbO3 Membrane Lapping. EFTF 2010, 24th European Frequency and Time Forum, Apr 2010, Noordwijk, Netherlands. ⟨hal-00578951⟩

Share

Metrics

Record views

134