Dynamical plasma study during CaCu3Ti4O12 and Ba0.6Sr0.4TiO3 pulsed laser deposition by local thermodynamic equilibrium modelling

Abstract : We performed space- and time- resolved plasma diagnostics during pulsed laser deposition of CaCu 3 Ti 4 O 12 (CCTO) and Ba 0.6 Sr 0.4 TiO 3 (BSTO) thin films. A KrF excimer laser irradiation at 248 nm with 25 ns pulse duration irradiates targets with a fluence varying from 1 to 2 J cm -2 under a oxygen pressure varying from 5 to 30 Pa. The plasma is shown to be optically thick and strongly non-uniform during the early expansion stage and the resonance lines Ca II 393 and 396 nm are strongly self-reversed during this time. Plasma temperature, electron density and relative elemental concentrations were obtained by comparing the experimental emission spectra to the spectral radiance computed for a non-uniform plasma in local thermal equilibrium. In this way, it was possible to evaluate very low concentrations of pollutants present in irradiated samples.
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Jean-François Lagrange, J. Hermann, J Wolfman, O Motret. Dynamical plasma study during CaCu3Ti4O12 and Ba0.6Sr0.4TiO3 pulsed laser deposition by local thermodynamic equilibrium modelling. Journal of Physics D: Applied Physics, IOP Publishing, 2010, 43 (28), pp.285202. ⟨10.1088/0022-3727/43/28/285202⟩. ⟨hal-00569650⟩

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