Design and simulation of a high resolution ultrasonic micro-transducer derived by LiNbO3

Jin-Ying Zhang , X.M. Ji , Wei-Jiang Xu , Julien Carlier (1, 2) , Bertrand Nongaillard (1) , Y.P. Huang

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 MAMINA - IEMN - Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN

A 100 MHz high resolution ultrasonic micro-transducer with a focal lens is designed for medical imaging based on monocrystalline lithium niobate (LiNbO 3 ) 36°/Y-cut. Finite element analysis is used to characterize the impulse response of this transducer and the stationary wave propagation. The results show that the focal lens attributes a lot to the directivity and the resolution. The wave derived by LiNbO 3 36°/Y-cut element demonstrates a better property compared with ZnO. The energy of transmitted wave at the focus is increased by 16.53% and 314.7% due to LiNbO 3 and the matching layers, respectively.

Mots clés: Lenses; Acoustics; Transducers; Biomedical imaging; Zinc oxide; Materials; Finite element methods

Domaines: Sciences de l'ingénieur [physics]

Jin-Ying Zhang, X.M. Ji, Wei-Jiang Xu, Julien Carlier, Bertrand Nongaillard, et al.. Design and simulation of a high resolution ultrasonic micro-transducer derived by LiNbO3. 10th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2010, 2010, Shanghai, China. pp.1898-1900, ⟨10.1109/ICSICT.2010.5667762⟩. ⟨hal-00568992⟩