Multiple wavelengths reflectance microscopy to study the multi-physical behavior of MEMS

Abstract : In order to characterize surface chemomechanical driving micro-electro-mechanical systems (MEMS) behavior, we propose herein a method to simultaneously obtain a full kinematic field describing the surface displacement and a map of its chemical modification from optical measurements. Using a microscope, reflected intensity fields are recorded for two different illumination wavelengths. Decoupling the wavelength-independent and -dependent contributions to the measured relative intensity changes then yields the sought fields. This method is applied to the investigation of the electro-elastic coupling, providing images of both the local surface electrical charge density and the device deformation field.
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https://hal.archives-ouvertes.fr/hal-00567440
Contributor : Christine Froidevaux <>
Submitted on : Monday, February 21, 2011 - 11:29:23 AM
Last modification on : Friday, July 5, 2019 - 1:27:25 AM
Long-term archiving on : Sunday, May 22, 2011 - 2:51:34 AM

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N. Garraud, Y. Fedala, F. Kanoufi, G. Teissier, J.P. Roger, et al.. Multiple wavelengths reflectance microscopy to study the multi-physical behavior of MEMS. Optics Letters, Optical Society of America, 2011, 36 (4), pp.594-596. ⟨10.1364/OL.36.000594⟩. ⟨hal-00567440⟩

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