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Realization of vertical silicon nanowire networks with an ultra high density using a top-down approach

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https://hal.archives-ouvertes.fr/hal-00549625
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Submitted on : Wednesday, December 22, 2010 - 11:16:28 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:23 PM

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X.L. Han, G. Larrieu, Emmanuel Dubois. Realization of vertical silicon nanowire networks with an ultra high density using a top-down approach. Journal of Nanoscience and Nanotechnology, American Scientific Publishers, 2010, 10, pp.7423-7427. ⟨10.1166/jnn.2010.2841⟩. ⟨hal-00549625⟩

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