Realization of vertical silicon nanowire networks with an ultra high density using a top-down approach

X.L. Han; G. Larrieu; Emmanuel Dubois

doi:10.1166/jnn.2010.2841

Journal articles

Realization of vertical silicon nanowire networks with an ultra high density using a top-down approach

X.L. Han G. Larrieu Emmanuel Dubois ¹

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520

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https://hal.archives-ouvertes.fr/hal-00549625
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Submitted on : Wednesday, December 22, 2010 - 11:16:28 AM
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Realization of vertical silicon nanowire networks with an ultra high density using a top-down approach

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Realization of vertical silicon nanowire networks with an ultra high density using a top-down approach

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