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Journal articles

Vacuum UV and UV spectroscopy of a N2-Ar mixtures discharge created by a RF helical coupling device

C. Foissac J. Kristof A. Annusova V. Martisovits P. Veis P. Supiot 1
1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
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Journal articles
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https://hal.archives-ouvertes.fr/hal-00549499
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Submitted on : Wednesday, December 22, 2010 - 10:03:28 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:23 PM

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IEMN | CNRS | UNIV-LILLE | UNIV-VALENCIENNES

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C. Foissac, J. Kristof, A. Annusova, V. Martisovits, P. Veis, et al.. Vacuum UV and UV spectroscopy of a N2-Ar mixtures discharge created by a RF helical coupling device. Plasma Sources Science and Technology, IOP Publishing, 2010, 19, pp.0550061-12. ⟨10.1088/0963-0252/19/5/055006⟩. ⟨hal-00549499⟩

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