Further studies on the lithium phosphorus oxynitride solid electrolyte

T. Pichonat (1, 2) , C. Lethien (1, 2) , Nicolas Tiercelin (1) , S. Godey (1) , E. Pichonat (3) , P. Roussel (4) , Marie Colmont (4) , P.A. Rolland (1, 2)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 IRCICA - Institut de Recherche sur les Composants logiciels et matériels pour l'Information et la Communication Avancé - UAR 3380
3 LASIRE - Laboratoire Avancé de Spectroscopie pour les Intéractions la Réactivité et l'Environnement - UMR 8516
4 UCCS - Unité de Catalyse et Chimie du Solide - UMR 8181

First step in the way to the fabrication of an all-solid microbattery for autonomous wireless sensor node, amorphous thin solid films of lithium phosphorus oxynitride (LiPON) were prepared by radio-frequency sputtering of a mixture target of P₂O₅/Li₂O in ambient nitrogen atmosphere. The morphology, composition, and ionic conductivity were characterized by scanning electron microscopy, energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, and A.C. impedance spectroscopy. With a thickness of 1.4 μm, the obtained LiPON amorphous layer provided an ionic conductivity close to 6 × 10⁻⁷ S cm⁻¹ at room temperature. MicroRaman UV spectroscopy study was successfully carried out for the first time on LiPON thin films to complete the characterization and bring further information on LiPON structure.

Mots clés: Lithium-ion (Li-ion) microbattery; Solid electrolyte; LiPON; Integration; Raman spectroscopy

Domaines: Matériaux

T. Pichonat, C. Lethien, Nicolas Tiercelin, S. Godey, E. Pichonat, et al.. Further studies on the lithium phosphorus oxynitride solid electrolyte. Materials Chemistry and Physics, 2010, 123, pp.231 - 235. ⟨10.1016/j.matchemphys.2010.04.001⟩. ⟨hal-00514193⟩