Characterization and control of a monolithically fabricated bistable module for microrobotic applications.

Qiao Chen (1) , Yassine Haddab (1) , Philippe Lutz (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Microrobots are widely used for microassembly and micromanipulation. However achieving performances compatible with the work in the microworld requires the use of bulky and expensive systems for measurement, signal processing and real time control. In this paper, we present the characterization and the control of a bistable module that can be used to build microrobots. This bistable module is fabricated monolithically using microfabrication technology. It offers two stable and blocked positions. High resolutions can be reached using this approach. Static and dynamic characteristics of the bistable module are studied and an open-loop control strategy is proposed in order to switch smoothly from one position to the other. The presented bistable module is the basic module for building digital microrobots.

Domaines: Micro et nanotechnologies/Microélectronique

Qiao Chen, Yassine Haddab, Philippe Lutz. Characterization and control of a monolithically fabricated bistable module for microrobotic applications.. IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS'10., Oct 2010, Taipei, Taiwan. pp.5756-5761. ⟨hal-00544630⟩