Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation

V. Vervisch (1) , Yannick Larmande (1) , Philippe Delaporte (1) , Thierry Sarnet (1) , Marc Sentis (1) , H. Etienne , F. Torregrosa (2) , Fuccio Cristiano , Pier-Francesco Fazzini

1 LP3 - Laboratoire Lasers, Plasmas et Procédés photoniques
2 IBS

Domaines: Science des matériaux [cond-mat.mtrl-sci]

V. Vervisch, Yannick Larmande, Philippe Delaporte, Thierry Sarnet, Marc Sentis, et al.. Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation. Applied Surface Science, 2009, 255 (10), pp.5647-5650. ⟨hal-00542699⟩