Development of Composite Single Crystal Wafers for Sources and Sensor applications exploiting High-overtone Bulk Acoustic Resonators

T. Baron (1) , E. Lebrasseur (1) , D. Hermelin (1) , D. Gachon (1) , S. Alzuaga (1) , G. Martin (1) , D. Rabus (1) , B. Guichardaz (1) , V. Pétrini (1) , S. Queste (1) , R. Salut (1) , S. Ballandras (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Domaines: Optique / photonique

T. Baron, E. Lebrasseur, D. Hermelin, D. Gachon, S. Alzuaga, et al.. Development of Composite Single Crystal Wafers for Sources and Sensor applications exploiting High-overtone Bulk Acoustic Resonators. JNTE 2010, Nov 2010, Palaiseau, France. ⟨hal-00534061⟩