Development of Composite Single Crystal Wafers for Sources and Sensor applications exploiting High-overtone Bulk Acoustic Resonators

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Conference papers
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https://hal.archives-ouvertes.fr/hal-00534061
Contributor : Sarah Djaouti <>
Submitted on : Monday, November 8, 2010 - 5:02:03 PM
Last modification on : Friday, July 6, 2018 - 3:06:07 PM

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  • HAL Id : hal-00534061, version 1

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T. Baron, E. Lebrasseur, D. Hermelin, D. Gachon, S. Alzuaga, et al.. Development of Composite Single Crystal Wafers for Sources and Sensor applications exploiting High-overtone Bulk Acoustic Resonators. JNTE 2010, Nov 2010, Palaiseau, France. ⟨hal-00534061⟩

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