Fabrication and packaging technologies of Love-wave-based microbalance for fluid analysis

Abstract : Sensors able to operate with liquid phases are the key-point for the development of biochemical lab-on-chip devices. In this work, we present the design and manufacture of Love-wave sensors equipped with a liquid cell, at the wafer scale level, to allow operation with liquid media. Love-wave sensors are fabricated on AT-cut quartz plates (IEEE Std-176 notation (YXlt)/36/90) and passivated by a 2.5 mu m thick silica overlay. The fabrication process using the celebrated SU-8 epoxy-based photoresist combined with silicon or quartz machined covers is presented, revealing robust enough for ensuring a reproducible sensor fabrication and packaging. Results are reported emphasizing the efficiency of the proposed approach
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Conference papers
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https://hal.archives-ouvertes.fr/hal-00533126
Contributor : Sarah Djaouti <>
Submitted on : Friday, November 5, 2010 - 11:40:34 AM
Last modification on : Friday, July 6, 2018 - 3:06:07 PM

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  • HAL Id : hal-00533126, version 1

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L. El Fissi, J.-M. Friedt, F. Cherioux, D. Luzet, S. Ballandras. Fabrication and packaging technologies of Love-wave-based microbalance for fluid analysis. 23rd Eurosensors Conference, Sep 2009, Lausanne, Switzerland. pp.304-309. ⟨hal-00533126⟩

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