Syntheses and structures of novel hafnium chloroamido mono-amidinate and mono-guanidinate as precursors for HfO2 thin film

M. Eleter (1) , L. G. Hubert-Pfalzgraf (1) , S. Daniele (1) , G. Pilet (2) , B. Tinant

1 IRCELYON - Institut de recherches sur la catalyse et l'environnement de Lyon
2 LMI - Laboratoire des Multimatériaux et Interfaces

The reactions between HfCl2[N(SiMe3)(2)](2) and one or two equivalents of [(PrNC)-Pr-i(Me)(NPr)-Pr-i]Li and Pr-i-N=C=N-Pr-i, at room temperature in toluene, gave the novel chloroamido-amidinato-hafnium HfCl[N(SiMe3)(2)](2)[(PrNC)-Pr-i(Me)(NPr)-Pr-i] (1) and chloroamido-guanidinato-hafnium HfCl2[N(SiMe3)(2)][(PrNC)-Pr-i(N (SiMe3)(2))N(i)Prl (2) compounds, respectively. Compounds 1 and 2 were characterized by NMR and X-ray single crystal diffraction analysis. Their reaction towards alcohol was studied in order to check the dependency between molecular structure and HfO2 Atomic Layer Deposition (ALD) specifications. (C) 2010 Elsevier Ltd. All rights reserved.

Domaines: Catalyse; Environnement et Société

M. Eleter, L. G. Hubert-Pfalzgraf, S. Daniele, G. Pilet, B. Tinant. Syntheses and structures of novel hafnium chloroamido mono-amidinate and mono-guanidinate as precursors for HfO2 thin film. Polyhedron, 2010, 29 (12), pp.2522-2526. ⟨10.1016/j.poly.2010.05.023⟩. ⟨hal-00512085⟩